White Light Reflectance Spectroscopy (WLRS) systems
ThetaMetrisis, a spin-off of the Institute of Microelectronics at NCSR ‘Demokritos,’ was established in 2009 in Athens, Greece. The company specializes in developing and manufacturing advanced tools for the precise, rapid, and non-destructive characterization of coatings across diverse sectors. Serving both industrial and research organizations globally, ThetaMetrisis is a trusted partner for cutting-edge measurement solutions.
At the heart of its innovation lies White Light Reflectance Spectroscopy (WLRS), a groundbreaking technology that enables accurate, simultaneous measurement of thickness and refractive index in stacked thin and thick films. This technology offers an impressive measurement range, spanning from angstroms to millimeters, catering to a wide variety of applications and industries.
What does ThetaMetrisis manufacture?
FR-pRo: Build2Order film characterization tool
The modular, scalable solution for non-destructive film characterization in the 1nm to 3mm thickness range. FR-pRo adapts to your specific application needs—whether you’re measuring film thickness, refractive index, color, transmittance, or reflectance. It can also support advanced film analysis under temperaturecontrolled, ambient-controlled, or liquid environments. Whatever your material, whatever your challenge, FRpRo delivers precision, performance, and versatility.
FR-Mic: Film characterization in the micrometer lateral scale
With FR-Mic, local measurement of film thickness, optical constants, reflectance, transmission, and absorbance across any spectral regime within UV / VIS / NIR spectral range, is just a matter of a click. FR-Mic can be mounted either on FR-pRo units or over external manual or motorized stages when large surfaces need to be characterized.
FR-Scanner-AIO-Mic-XY300: Automated & Fast Mapping of films in the micron lateral scale
FR-Scanner-AIO-Mic-XY300 is a holistic platform for the fully-automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides true 300mm of travel along X and Y axes and is suitable for accurate measurements while the sample is secured on the stage through vacuum. The tool is offered in a wide range of optical configurations within the 200-1700nm spectral range.
FR-CasScan: Automated Thin-film Thickness Mapping with Cassette Loader
FR-CasScan is a radical & holistic wafer characterization system at production environments. FR-CasScan provides fully automated characterization of films on wafers along with a robust Cassette Loader. FR-CasScan is equipped with advanced features such such as: pre-aligner, high resolution and repeatability XY stage with 200mm travel on each axis, powerful UV/VIS/NIR autofocus microscope, high resolution spectrometer and numerous accessories (OCR, SECS/GEM, …)
